Lukashchuk, Anton http://orcid.org/0000-0001-5151-7059
Riemensberger, Johann http://orcid.org/0000-0002-3468-6501
Tusnin, Aleksandr http://orcid.org/0000-0002-8939-7336
Liu, Junqiu http://orcid.org/0000-0003-2405-6028
Kippenberg, Tobias J. http://orcid.org/0000-0002-3408-886X
Article History
Received: 29 September 2022
Accepted: 30 May 2023
First Online: 20 July 2023
Competing interests
: T.J.K. is a co-founder and shareholder of LiGenTec SA, a start-up company that is engaged in making Si<sub>3</sub>N<sub>4</sub> nonlinear photonic chips available via foundry service. The other authors declare no competing interests.