Riemensberger, Johann http://orcid.org/0000-0002-3468-6501
Lukashchuk, Anton
Karpov, Maxim http://orcid.org/0000-0002-9304-3936
Weng, Wenle http://orcid.org/0000-0003-2628-5174
Lucas, Erwan http://orcid.org/0000-0002-8917-6824
Liu, Junqiu http://orcid.org/0000-0003-2405-6028
Kippenberg, Tobias J. http://orcid.org/0000-0002-3408-886X
Article History
Received: 31 October 2019
Accepted: 16 March 2020
First Online: 13 May 2020
Competing interests
: T.J.K. is a co-founder and shareholder of LiGenTec SA, a start-up company that is engaged in making Si<sub>3</sub>N<sub>4</sub> nonlinear photonic chips available via foundry service.