Selectable phase formation in VAlN thin films by controlling Al+ subplantation depth
Crossref DOI link: https://doi.org/10.1038/s41598-017-17846-5
Published Online: 2017-12-13
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Greczynski, G. http://orcid.org/0000-0002-4898-5115
Mráz, S.
Hultman, L.
Schneider, J. M.
Text and Data Mining valid from 2017-12-13
Version of Record valid from 2017-12-13
Article History
Received: 18 September 2017
Accepted: 28 November 2017
First Online: 13 December 2017
Competing Interests
: The authors declare that they have no competing interests.