Nitrogen implantation with a scanning electron microscope
Crossref DOI link: https://doi.org/10.1038/s41598-017-18373-z
Published Online: 2018-01-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Becker, S.
Raatz, N.
Jankuhn, St.
John, R.
Meijer, J.
Text and Data Mining valid from 2018-01-08
Version of Record valid from 2018-01-08
Article History
Received: 1 September 2017
Accepted: 11 December 2017
First Online: 8 January 2018
Competing Interests
: The authors declare that they have no competing interests.