Terahertz-driven polymerization of resists in nanoantennas
Crossref DOI link: https://doi.org/10.1038/s41598-018-26214-w
Published Online: 2018-05-17
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Park, Woongkyu
Lee, Youjin
Kang, Taehee
Jeong, Jeeyoon
Kim, Dai-Sik
Text and Data Mining valid from 2018-05-17
Version of Record valid from 2018-05-17
Article History
Received: 5 March 2018
Accepted: 16 April 2018
First Online: 17 May 2018
Competing Interests
: The authors declare no competing interests.