Piezoresistive temperature sensors fabricated by a surface micromachining CMOS MEMS process
Crossref DOI link: https://doi.org/10.1038/s41598-018-35113-z
Published Online: 2018-11-20
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Cai, Chunhua
Tan, Junyan http://orcid.org/0000-0001-8662-7151
Hua, Di
Qin, Ming
Zhu, Nianfang
Text and Data Mining valid from 2018-11-20
Version of Record valid from 2018-11-20
Article History
Received: 26 March 2018
Accepted: 30 October 2018
First Online: 20 November 2018
Competing Interests
: The authors declare no competing interests.