A CMOS MEMS-based Membrane-Bridge Nanomechanical Sensor for Small Molecule Detection
Crossref DOI link: https://doi.org/10.1038/s41598-020-60057-8
Published Online: 2020-02-19
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Yen, Yi-Kuang
Chiu, Chao-Yuan
Text and Data Mining valid from 2020-02-19
Version of Record valid from 2020-02-19
Article History
Received: 22 October 2019
Accepted: 5 February 2020
First Online: 19 February 2020
Competing interests
: The authors declare no competing interests.