Polarity Inversion of Aluminum Nitride Thin Films by using Si and MgSi Dopants
Crossref DOI link: https://doi.org/10.1038/s41598-020-61285-8
Published Online: 2020-03-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Anggraini, Sri Ayu
Uehara, Masato
Hirata, Kenji
Yamada, Hiroshi
Akiyama, Morito
Text and Data Mining valid from 2020-03-09
Version of Record valid from 2020-03-09
Article History
Received: 1 July 2019
Accepted: 24 December 2019
First Online: 9 March 2020
Competing interests
: The authors declare no competing interests.