Micro-Fabricated Presure Sensor Using 50 nm-Thick of Pd-Based Metallic Glass Freestanding Membrane
Crossref DOI link: https://doi.org/10.1038/s41598-020-67150-y
Published Online: 2020-06-22
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Van Toan, Nguyen
Tuoi, Truong Thi Kim
Tsai, Yao-Chuan
Lin, Yu-Ching
Ono, Takahito
Text and Data Mining valid from 2020-06-22
Version of Record valid from 2020-06-22
Article History
Received: 25 March 2020
Accepted: 1 June 2020
First Online: 22 June 2020
Competing interests
: The authors declare no competing interests.