Spatially controlled nano-structuring of silicon with femtosecond vortex pulses
Crossref DOI link: https://doi.org/10.1038/s41598-020-69390-4
Published Online: 2020-07-28
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Rahimian, M. G.
Jain, A.
Larocque, H.
Corkum, P. B.
Karimi, E.
Bhardwaj, V. R.
Text and Data Mining valid from 2020-07-28
Version of Record valid from 2020-07-28
Article History
Received: 17 December 2019
Accepted: 8 July 2020
First Online: 28 July 2020
Competing interest
: The authors declare no competing interests.