Photo-oxidative degradation of polyacids derived ceria nanoparticle modulation for chemical mechanical polishing
Crossref DOI link: https://doi.org/10.1038/s41598-021-03866-9
Published Online: 2022-01-31
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kim, Eungchul
Hong, Jiah
Seok, Hyunho
Kim, Taesung
Text and Data Mining valid from 2022-01-31
Version of Record valid from 2022-01-31
Article History
Received: 6 August 2021
Accepted: 6 December 2021
First Online: 31 January 2022
Competing interests
: The authors declare no competing interests.