Xu, Yilin
Maier, Pascal
Blaicher, Matthias
Dietrich, Philipp-Immanuel
Marin-Palomo, Pablo
Hartmann, Wladislaw
Bao, Yiyang
Peng, Huanfa
Billah, Muhammad Rodlin
Singer, Stefan
Troppenz, Ute
Moehrle, Martin
Randel, Sebastian
Freude, Wolfgang
Koos, Christian
Funding for this research was provided by:
Bundesministerium für Bildung und Forschung (# 13N14630)
Deutsche Forschungsgemeinschaft (EXC-2082/1-390761711)
European Research Council (# 773248)
Horizon 2020 Framework Programme (# 731954)
Karlsruhe School of Optics and Photonics
Alfried Krupp von Bohlen und Halbach-Stiftung
Karlsruher Institut für Technologie (KIT)
Article History
Received: 12 April 2021
Accepted: 28 July 2021
First Online: 12 August 2021
Competing interests
: P.-I.D. and C.K. are co-founders and shareholders of Vanguard Photonics GmbH and Vanguard Automation GmbH, start-up companies engaged in exploiting 3D nanoprinting in the field of photonic integration and assembly. P.-I.D. and M.R.B. are employees of Vanguard Automation GmbH. Y.X., P.M., M.B., P.-I.D., M.R.B., and C.K. are co-inventors of patents owned by Karlsruhe Institute of Technology (KIT) in the technical field of the publication. M.B. is now employee of Nanoscribe GmbH, a company selling 3D lithography systems. The remaining authors P.M.-P., W.H., Y.B., H.P., S.S., U.T., M.M., S.R, and W.F. declare no competing interests.