Yurchenko, Olena
Pernau, Hans-Fridtjof
Engel, Laura
Wöllenstein, Jürgen
Funding for this research was provided by:
Fraunhofer-Gesellschaft (FluMEMs)
Bundesministerium für Bildung und Forschung (E! 113779)
Fraunhofer-Institut für Physikalische Messtechnik IPM
Article History
Received: 15 March 2023
Accepted: 12 June 2023
First Online: 16 June 2023
Competing interests
: The authors declare no competing interests.