Huo, Qiang https://orcid.org/0000-0002-9529-9919
Yang, Yiming https://orcid.org/0000-0002-2369-4231
Wang, Yiming https://orcid.org/0000-0003-1417-8611
Lei, Dengyun https://orcid.org/0000-0001-8935-649X
Fu, Xiangqu
Ren, Qirui
Xu, Xiaoxin
Luo, Qing https://orcid.org/0000-0002-3419-4400
Xing, Guozhong
Chen, Chengying
Si, Xin
Wu, Hao
Yuan, Yiyang https://orcid.org/0000-0002-8261-1707
Li, Qiang https://orcid.org/0000-0001-9503-995X
Li, Xiaoran https://orcid.org/0000-0002-2609-3554
Wang, Xinghua https://orcid.org/0000-0003-1825-7595
Chang, Meng-Fan https://orcid.org/0000-0001-6905-6350
Zhang, Feng https://orcid.org/0000-0003-2316-0392
Liu, Ming
Funding for this research was provided by:
CAS | Institute of Microelectronics of the Chinese Academy of Sciences (2018YFB0407500,, 2018YFB0407500,, 2018YFB0407500,, 2018YFB0407500,, 2018YFB0407500,, 2018YFB0407500,, 2018YFB0407500,, 2018YFB0407500,, 2018YFB0407500,, 2018YFB0407500,, 2018YFB0407500,, 2018YFB0407500,, 2018YFB0407500,, 2018YFB0407500,, 2018YFB0407500,)
Article History
Received: 4 June 2021
Accepted: 14 June 2022
First Online: 26 July 2022
Competing interests
: The authors declare no competing interests.