Variable-angle high-angle annular dark-field imaging: application to three-dimensional dopant atom profiling
Crossref DOI link: https://doi.org/10.1038/srep12419
Published Online: 2015-07-24
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zhang, Jack Y.
Hwang, Jinwoo
Isaac, Brandon J.
Stemmer, Susanne
Text and Data Mining valid from 2015-07-24
Version of Record valid from 2015-07-24
Article History
Received: 11 February 2015
Accepted: 29 June 2015
First Online: 24 July 2015
Competing interests
: The authors declare no competing financial interests.