High throughput optical lithography by scanning a massive array of bowtie aperture antennas at near-field
Crossref DOI link: https://doi.org/10.1038/srep16192
Published Online: 2015-11-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Wen, X.
Datta, A.
Traverso, L. M.
Pan, L.
Xu, X.
Moon, E. E.
Text and Data Mining valid from 2015-11-03
Version of Record valid from 2015-11-03
Article History
Received: 30 April 2015
Accepted: 12 October 2015
First Online: 3 November 2015
Competing interests
: The authors declare no competing financial interests.