Nondestructive nanofabrication on Si(100) surface by tribochemistry-induced selective etching
Crossref DOI link: https://doi.org/10.1038/srep16472
Published Online: 2015-11-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Guo, Jian
Yu, Bingjun
Chen, Lei
Qian, Linmao
Text and Data Mining valid from 2015-11-12
Version of Record valid from 2015-11-12
Article History
Received: 29 June 2015
Accepted: 12 October 2015
First Online: 12 November 2015
Competing interests
: The authors declare no competing financial interests.