Single-photon-multi-layer-interference lithography for high-aspect-ratio and three-dimensional SU-8 micro-/nanostructures
Crossref DOI link: https://doi.org/10.1038/srep18428
Published Online: 2016-01-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ghosh, Siddharth
Ananthasuresh, G. K.
Text and Data Mining valid from 2016-01-04
Version of Record valid from 2016-01-04
Article History
Received: 17 July 2015
Accepted: 18 November 2015
First Online: 4 January 2016
Competing interests
: The authors declare no competing financial interests.