Growth and Stress-induced Transformation of Zinc blende AlN Layers in Al-AlN-TiN Multilayers
Crossref DOI link: https://doi.org/10.1038/srep18554
Published Online: 2015-12-18
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Li, Nan
Yadav, Satyesh K.
Wang, Jian
Liu, Xiang-Yang
Misra, Amit
Text and Data Mining valid from 2015-12-18
Version of Record valid from 2015-12-18
Article History
Received: 17 July 2015
Accepted: 20 November 2015
First Online: 18 December 2015
Competing interests
: The authors declare no competing financial interests.