A novel 2D silicon nano-mold fabrication technique for linear nanochannels over a 4 inch diameter substrate
Crossref DOI link: https://doi.org/10.1038/srep18921
Published Online: 2016-01-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Yin, Zhifu
Qi, Liping
Zou, Helin
Sun, Lei
Text and Data Mining valid from 2016-01-11
Version of Record valid from 2016-01-11
Article History
Received: 16 July 2015
Accepted: 30 November 2015
First Online: 11 January 2016
Competing interests
: The authors declare no competing financial interests.