Silicon deposition in nanopores using a liquid precursor
Crossref DOI link: https://doi.org/10.1038/srep37689
Published Online: 2016-11-22
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Masuda, Takashi
Tatsuda, Narihito
Yano, Kazuhisa
Shimoda, Tatsuya
Text and Data Mining valid from 2016-11-22
Version of Record valid from 2016-11-22
Article History
Received: 27 July 2016
Accepted: 1 November 2016
First Online: 22 November 2016
Competing interests
: The authors declare no competing financial interests.