Plasma-chemical synthesis of transparent dielectric Si–C–O–H films from trimethylphenoxysilane
Crossref DOI link: https://doi.org/10.1134/S0018143916030085
Published Online: 2016-05-19
Published Print: 2016-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ermakova, E. N.
Rumyantsev, Yu. M.
Rakhlin, V. I.
Kosinova, M. L.
Text and Data Mining valid from 2016-05-01