Features of germanium tetrafluoride reduction with hydrogen in inductively and capacitively coupled radiofrequency discharges
Crossref DOI link: https://doi.org/10.1134/S0018143916060072
Published Online: 2017-02-09
Published Print: 2017-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kornev, R. A.
Sennikov, P. G.
Konychev, D. A.
License valid from 2017-01-01
