Kinetic features of plasma etching of polycarbonate in oxygen plasma
Crossref DOI link: https://doi.org/10.1134/S0018143917030134
Published Online: 2017-05-23
Published Print: 2017-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ovtsyn, A. A.
Smirnov, S. A.
Artyukhov, A. I.
Shibaev, S. A.
License valid from 2017-05-01