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Modification of Diazoquinone–Novolac Photoresist Films beyond the Region of Implantation of B+ Ions

Published Online: 2020-09-23

Published Print: 2020-09

Authors

Brinkevich, S. D.

Grinyuk, E. V.

Brinkevich, D. I.

Prosolovich, V. S.
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Text and Data Mining valid from 2020-09-01

Version of Record valid from 2020-09-01
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Article History

Received: 16 March 2020

Revised: 16 March 2020

Accepted: 7 May 2020

First Online: 23 September 2020

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