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Molecular Dynamics Simulation of Copper Nanofilm Self-Assembly on Silicon Substrate under Gas-Discharge Plasma Conditions

Crossref DOI link: https://doi.org/10.1134/S0018143921050039

Published Online: 2021-09-22

Published Print: 2021-09

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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