Kinetics of Silicon Etching in Trifluoromethane Plasma
Crossref DOI link: https://doi.org/10.1134/S0018143922020114
Published Online: 2022-05-25
Published Print: 2022-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Pivovarenok, S. A.
Murin, D. B.
Text and Data Mining valid from 2022-05-25
Version of Record valid from 2022-05-25
Article History
Received: 7 September 2021
Revised: 27 October 2021
Accepted: 2 November 2021
First Online: 25 May 2022
CONFLICT OF INTEREST
: The authors declare that they have no conflicts of interest.