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Influence of Mixture Composition on Electrophysical Parameters and Emission Spectra of Trifluoromethane Plasma with Oxygen and Argon

Published Online: 2023-04-17

Published Print: 2023-04

Authors

Pivovarenok, S. A.

Murin, D. B.

Grazhdyan, A. Yu.
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Text and Data Mining valid from 2023-04-01

Version of Record valid from 2023-04-01
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Article History

Received: 10 November 2022

Revised: 10 November 2022

Accepted: 12 November 2022

First Online: 17 April 2023

CONFLICT OF INTEREST

: The authors declare no conflict of interest.

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