Crossmark

On the Mechanisms of Symmetry Breaking in Plasma-Chemical High-Frequency Low-Pressure Capacitive Reactors

Published Online: 2023-09-08

Published Print: 2023-10

Authors

Dvinin, S. A.

Kodirzoda, Z. A.

Sinkevich, O. A.

Solikhov, D. K.
License Information

Text and Data Mining valid from 2023-09-08

Version of Record valid from 2023-09-08
More Information

Article History

Received: 10 April 2023

Revised: 10 April 2023

Accepted: 10 April 2023

First Online: 8 September 2023

CONFLICT OF INTEREST

: The authors declare that they have no conflicts of interest.

Document is current