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Investigation of the Discharge Chamber Expansion Region Influence on the Electron Density in an Inductively Coupled RF Discharge

Published Online: 2023-09-08

Published Print: 2023-10

Authors

Shemakhin, A. Y.

Zheltukhin, V. S.

Kiselev, G. B.

Terentev, T. N.
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Text and Data Mining valid from 2023-09-08

Version of Record valid from 2023-09-08
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Article History

Received: 10 April 2023

Revised: 10 April 2023

Accepted: 10 April 2023

First Online: 8 September 2023

CONFLICT OF INTEREST

: The authors declare that they have no conflicts of interest.

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