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Study of the Electron Velocity Distribution Function in Weakly Ionized Radiofrequency Plasma

Published Online: 2024-04-01

Published Print: 2024-02

Authors

Shemakhin, A. Yu.
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Text and Data Mining valid from 2024-02-01

Version of Record valid from 2024-02-01
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Article History

Received: 25 July 2023

Revised: 19 September 2023

Accepted: 20 September 2023

First Online: 1 April 2024

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

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