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Adhesion of Electron-Irradiated Diazoquinone–Novolac Photoresist Films to Single-Crystal Silicon

Published Online: 2024-04-01

Published Print: 2024-02

Authors

Vabishchevich, S. A.

Vabishchevich, N. V.

Brinkevich, S. D.

Brinkevich, D. I.

Prosolovich, V. S.

Lastovskii, S. B.
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Text and Data Mining valid from 2024-02-01

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Article History

Received: 10 May 2023

Revised: 18 September 2023

Accepted: 18 September 2023

First Online: 1 April 2024

CONFLICT OF INTEREST

: The authors declare that they have no conflicts of interest.

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