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Prediction of Characteristics of Inductive Coupled Radio Frequency Discharge at Low Pressure in One-Dimensional Approximation Using Neural Network Approach

Crossref DOI link: https://doi.org/10.1134/S0018143924701273

Published Online: 2024-12-30

Published Print: 2024-12

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Skvortsov, I. V.

Shemakhin, A. Y.

Danilov, I. Y.

Gaskova, D. A.
License Information

Text and Data Mining valid from 2024-12-01

Version of Record valid from 2024-12-01
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Article History

Received: 11 September 2024

Revised: 11 September 2024

Accepted: 11 September 2024

First Online: 30 December 2024

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

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