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Structural Features of Aluminum Nitride Films Obtained by Magnetron Sputtering

Published Online: 2024-12-30

Published Print: 2024-12

Authors

Strunin, V. I.

Baisova, B. T.

Baranova, L. V.
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Text and Data Mining valid from 2024-12-01

Version of Record valid from 2024-12-01
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Article History

Received: 11 September 2024

Revised: 11 September 2024

Accepted: 11 September 2024

First Online: 30 December 2024

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

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