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Development of a Kinetic Model of Microwave Discharge Plasma in Electron Cyclotron Resonance Mode with Allowance for the Temporal Evolution of the Electron Distribution Function

Crossref DOI link: https://doi.org/10.1134/S0018151X21010144

Published Online: 2022-03-19

Published Print: 2021-01

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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