Thermodynamic analysis of Ta chemical vapor deposition via the reduction of tantalum halides with cadmium and zinc
Crossref DOI link: https://doi.org/10.1134/S0020168515060059
Published Online: 2015-05-06
Published Print: 2015-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Goncharov, O. Yu.
Faizullin, R. R.
Guskov, V. N.
Baldaev, L. Kh.
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