Growth of aluminum nitride films by plasma-enhanced atomic layer deposition
Crossref DOI link: https://doi.org/10.1134/S0020168515070158
Published Online: 2015-07-01
Published Print: 2015-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Tarala, V. A.
Altakhov, A. S.
Shevchenko, M. Yu.
Valyukhov, D. P.
Lisitsyn, S. V.
Martens, V. Ya.
Text and Data Mining valid from 2015-07-01