Synthesis of thin silicon carbonitride films from hexamethyldisilazane in an inductively coupled plasma reactor
Crossref DOI link: https://doi.org/10.1134/S0020168515090162
Published Online: 2015-08-01
Published Print: 2015-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Rumyantsev, Yu. M.
Chagin, M. N.
Kosinova, M. L.
Kuznetsov, F. A.
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