Tantalum chemical vapor deposition on substrates from various materials
Crossref DOI link: https://doi.org/10.1134/S0020168517100089
Published Online: 2017-09-14
Published Print: 2017-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Goncharov, O. Yu.
Treshchev, S. Yu.
Lad’yanov, V. I.
Faizullin, R. R.
Guskov, V. N.
Baldaev, L. Kh.
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