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The Influence of the Power Supply of a Magnetron Sputtering System on the Properties of the Deposited TiO2 Films

Crossref DOI link: https://doi.org/10.1134/S0020168518150025

Published Online: 2019-01-17

Published Print: 2018-12

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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