Surface Reactivity of Single-Crystal Silicon in Atomic Layer Deposition Processes
Crossref DOI link: https://doi.org/10.1134/S0020168519020031
Published Online: 2019-05-22
Published Print: 2019-02
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ezhovskii, Yu. K.
Text and Data Mining valid from 2019-02-01
Version of Record valid from 2019-02-01
Article History
Received: 5 March 2018
Accepted: 3 July 2018
First Online: 22 May 2019