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Effect of Precursor on the Dielectric Properties of Diamond-Like Silicon–Carbon Films

Published Online: 2020-08-31

Published Print: 2020-08

Authors

Barinov, A. D.

Gurinovich, T. D.

Popov, A. I.

Chukanova, T. S.

Shapetina, M. A.

Shupegin, M. L.
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Text and Data Mining valid from 2020-08-01

Version of Record valid from 2020-08-01
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Article History

Received: 12 December 2019

Revised: 19 March 2020

Accepted: 25 March 2020

First Online: 31 August 2020

Document is current