Reactivity of Hydroxyl Groups on the Surface of Solid Oxides in Atomic Layer Deposition Processes
Crossref DOI link: https://doi.org/10.1134/S0020168521090065
Published Online: 2021-10-04
Published Print: 2021-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ezhovskii, Yu. K.
Text and Data Mining valid from 2021-09-01
Version of Record valid from 2021-09-01
Article History
Received: 25 March 2020
Revised: 8 April 2021
Accepted: 29 April 2021
First Online: 4 October 2021