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Growth of Aluminum Molybdenum Oxide Films by Atomic Layer Deposition with Using Trimethylaluminum, Molybdenum Oxytetrachloride, and Water

Published Online: 2023-09-21

Published Print: 2023-04

Authors

Maksumova, A. M.

Bodalev, I. S.

Suleimanov, S. I.

Alikhanov, N. M.-R.

Abdulagatov, I. M.

Rabadanov, M. Kh.

Abdulagatov, A. I.
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Text and Data Mining valid from 2023-04-01

Version of Record valid from 2023-04-01
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Article History

Received: 13 January 2023

Revised: 28 February 2023

Accepted: 1 March 2023

First Online: 21 September 2023

CONFLICT OF INTEREST

: The authors declare that they have no conflicts of interest.

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