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Quantification of Si Dopant in β-Ga2O3-Based Semiconductor Gas Sensors by Total Reflection X-Ray Fluorescence Spectroscopy (TXRF)

Published Online: 2024-03-20

Published Print: 2023-12

Authors

Filatova, D. G.

Bogdanova, A. P.

Krivetskiy, V. V.

Penkina, T. N.

Rumyantseva, M. N.
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Text and Data Mining valid from 2023-12-01

Version of Record valid from 2023-12-01
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Article History

Received: 20 May 2022

Revised: 20 May 2022

Accepted: 23 June 2022

First Online: 20 March 2024

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

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