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Growth of TiSiN Films by Room-Temperature Reactive Magnetron Sputtering

Published Online: 2025-03-10

Published Print: 2024-06

Authors

Sulyaeva, V. S.

Syrokvashin, M. M.

Kozhevnikov, A. K.

Ermakova, E. N.
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Text and Data Mining valid from 2024-06-01

Version of Record valid from 2024-06-01
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Article History

Received: 6 September 2023

Revised: 17 November 2023

Accepted: 18 November 2023

First Online: 10 March 2025

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

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