Equipment for deposition of thin metallic films bombarded by fast argon atoms
Crossref DOI link: https://doi.org/10.1134/S0020441214020110
Published Online: 2014-06-01
Published Print: 2014-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Metel, A.
Bolbukov, V.
Volosova, M.
Grigoriev, S.
Melnik, Yu.
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