Langmuir probe study of reactive magnetron discharge plasma in a three-component gas atmosphere
Crossref DOI link: https://doi.org/10.1134/S0020441216050055
Published Online: 2016-11-15
Published Print: 2016-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Evdokimov, K. E.
Konishchev, M. E.
Chzhilei, S.
Pichugin, V. F.
License valid from 2016-11-01