Laser equipment for hardness evaluation of semiconductor elements exposed to heavy charged particles (Review)
Crossref DOI link: https://doi.org/10.1134/S0020441216050122
Published Online: 2016-09-28
Published Print: 2016-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Mavritskii, O. B.
Chumakov, A. I.
Egorov, A. N.
Pechenkin, A. A.
Nikiforov, A. Yu.
License valid from 2016-09-01