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An automatic apparatus for the preparation of thin films by successive ionic layer deposition

Published Online: 2017-11-12

Published Print: 2017-11

Authors

Andronov, A. O.

Matyushkin, L. B.

Khondryukov, D. V.

Aleksandrova, A. O.

Moshnikov, V. A.
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Text and Data Mining valid from 2017-11-01

Version of Record valid from 2017-11-01
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Article History

Received: 22 November 2016

First Online: 12 November 2017

Document is current